Multivariable Experiment Design with Application to a Wafer Stage: a Sequential Relaxation Approach for Dealing with Element-Wise Constraints

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Bibliographic Details
Published inIFAC-PapersOnLine Vol. 53; no. 2; pp. 8565 - 8570
Main Authors Dirkx, Nic, Oomen, Tom
Format Journal Article Conference Proceeding
LanguageEnglish
Published 2020
Online AccessGet full text
ISSN2405-8963
2405-8971
2405-8963
DOI10.1016/j.ifacol.2020.12.564

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ISSN:2405-8963
2405-8971
2405-8963
DOI:10.1016/j.ifacol.2020.12.564