Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control
We present a high-speed optical beamsteering system based on an 8x8 MEMS phased array. The system incorporates an in situ interferometer that provides a real-time, dynamic measure of the phase of each mirror in the array during beamsteering. A closed-loop phase-control algorithm results in <π/100...
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| Published in | Optics express Vol. 21; no. 3; p. 2807 |
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| Main Authors | , , , , , , |
| Format | Journal Article |
| Language | English |
| Published |
United States
11.02.2013
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1094-4087 1094-4087 |
| DOI | 10.1364/OE.21.002807 |
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| Abstract | We present a high-speed optical beamsteering system based on an 8x8 MEMS phased array. The system incorporates an in situ interferometer that provides a real-time, dynamic measure of the phase of each mirror in the array during beamsteering. A closed-loop phase-control algorithm results in <π/100 mirror phase accuracy and far field beam steering is shown. Stroboscopic measurement capabilities are demonstrated which allow us to show feedforward control to eliminate micromirror ringing. |
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| AbstractList | We present a high-speed optical beamsteering system based on an 8x8 MEMS phased array. The system incorporates an in situ interferometer that provides a real-time, dynamic measure of the phase of each mirror in the array during beamsteering. A closed-loop phase-control algorithm results in <π/100 mirror phase accuracy and far field beam steering is shown. Stroboscopic measurement capabilities are demonstrated which allow us to show feedforward control to eliminate micromirror ringing. We present a high-speed optical beamsteering system based on an 8x8 MEMS phased array. The system incorporates an in situ interferometer that provides a real-time, dynamic measure of the phase of each mirror in the array during beamsteering. A closed-loop phase-control algorithm results in <π/100 mirror phase accuracy and far field beam steering is shown. Stroboscopic measurement capabilities are demonstrated which allow us to show feedforward control to eliminate micromirror ringing.We present a high-speed optical beamsteering system based on an 8x8 MEMS phased array. The system incorporates an in situ interferometer that provides a real-time, dynamic measure of the phase of each mirror in the array during beamsteering. A closed-loop phase-control algorithm results in <π/100 mirror phase accuracy and far field beam steering is shown. Stroboscopic measurement capabilities are demonstrated which allow us to show feedforward control to eliminate micromirror ringing. |
| Author | Chan, Trevor K. Megens, Mischa Yoo, Byung-Wook Wyras, John Wu, Ming C. Horsley, David A. Chang-Hasnain, Connie J. |
| Author_xml | – sequence: 1 givenname: Trevor K. surname: Chan fullname: Chan, Trevor K. – sequence: 2 givenname: Mischa surname: Megens fullname: Megens, Mischa – sequence: 3 givenname: Byung-Wook surname: Yoo fullname: Yoo, Byung-Wook – sequence: 4 givenname: John surname: Wyras fullname: Wyras, John – sequence: 5 givenname: Connie J. surname: Chang-Hasnain fullname: Chang-Hasnain, Connie J. – sequence: 6 givenname: Ming C. surname: Wu fullname: Wu, Ming C. – sequence: 7 givenname: David A. surname: Horsley fullname: Horsley, David A. |
| BackLink | https://www.ncbi.nlm.nih.gov/pubmed/23481737$$D View this record in MEDLINE/PubMed |
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| SubjectTerms | Algorithms Equipment Design Equipment Failure Analysis Feedback Interferometry - instrumentation Lenses Micro-Electrical-Mechanical Systems - instrumentation |
| Title | Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control |
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