Optical beamsteering using an 8 × 8 MEMS phased array with closed-loop interferometric phase control

We present a high-speed optical beamsteering system based on an 8x8 MEMS phased array. The system incorporates an in situ interferometer that provides a real-time, dynamic measure of the phase of each mirror in the array during beamsteering. A closed-loop phase-control algorithm results in <π/100...

Full description

Saved in:
Bibliographic Details
Published inOptics express Vol. 21; no. 3; p. 2807
Main Authors Chan, Trevor K., Megens, Mischa, Yoo, Byung-Wook, Wyras, John, Chang-Hasnain, Connie J., Wu, Ming C., Horsley, David A.
Format Journal Article
LanguageEnglish
Published United States 11.02.2013
Subjects
Algorithms
Equipment Design
Equipment Failure Analysis
Feedback
Interferometry - instrumentation
Lenses
Micro-Electrical-Mechanical Systems - instrumentation
Online AccessGet full text
ISSN1094-4087
1094-4087
DOI10.1364/OE.21.002807

Cover

More Information
Summary:We present a high-speed optical beamsteering system based on an 8x8 MEMS phased array. The system incorporates an in situ interferometer that provides a real-time, dynamic measure of the phase of each mirror in the array during beamsteering. A closed-loop phase-control algorithm results in <π/100 mirror phase accuracy and far field beam steering is shown. Stroboscopic measurement capabilities are demonstrated which allow us to show feedforward control to eliminate micromirror ringing.
Bibliography:ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.21.002807