The Gas Nucleation Process Study of Anatase TiO2 in Atmospheric Non-Thermal Plasma Enhanced Chemical Vapor Deposition

Abstract The gas phase nucleation process of anatase TiO2 in atmospheric non-thermal plasma enhanced chemical vapor deposition is studied. The particles synthesized in the plasma gas phase at different power density were collected outside of the reactor. The structure of the collected particles has...

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Published in等离子体科学和技术：英文版 no. 1; pp. 32 - 36
Main Author 吴茂水 徐雨 戴林君 王恬恬 李雪 王德信 郭颖 丁可 黄晓江 石建军 张菁
Format Journal Article
LanguageEnglish
Published 2014
Subjects
TiO2
大气
成核过程
等离子体化学气相沉积
等离子气体
锐钛矿型
非热等离子体
高分辨透射电子显微镜
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ISSN1009-0630
DOI10.1088/1009-0630/16/1/07

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Summary:Abstract The gas phase nucleation process of anatase TiO2 in atmospheric non-thermal plasma enhanced chemical vapor deposition is studied. The particles synthesized in the plasma gas phase at different power density were collected outside of the reactor. The structure of the collected particles has been investigated by field scanning electron microscope （FESEM）, X-ray diffraction （XRD）, high resolution transmission electron microscopy （HRTEM） and selected area electron diffraction （SAED）. The analysis shows that uniform crystalline nuclei with average size of several nanometers have been formed in the scale of micro second through this reactive atmo- spheric plasma gas process. The crystallinity of the nanoparticles increases with power density. The high density of crystalline nanonuclei in the plasma gas phase and the low gas temperature are beneficial to the fast deposition of the 3D porous anatase TiO2 film.
Bibliography:Abstract The gas phase nucleation process of anatase TiO2 in atmospheric non-thermal plasma enhanced chemical vapor deposition is studied. The particles synthesized in the plasma gas phase at different power density were collected outside of the reactor. The structure of the collected particles has been investigated by field scanning electron microscope （FESEM）, X-ray diffraction （XRD）, high resolution transmission electron microscopy （HRTEM） and selected area electron diffraction （SAED）. The analysis shows that uniform crystalline nuclei with average size of several nanometers have been formed in the scale of micro second through this reactive atmo- spheric plasma gas process. The crystallinity of the nanoparticles increases with power density. The high density of crystalline nanonuclei in the plasma gas phase and the low gas temperature are beneficial to the fast deposition of the 3D porous anatase TiO2 film.
34-1187/TL
gas phase nucleation, TiO2 nanoparticles, plasma enhanced chemical vapordeposition （PECVD）, 3D nanostructured films, atmospheric pressure
ISSN:1009-0630
DOI:10.1088/1009-0630/16/1/07