Measurement of the O2 Dissociation Fraction in RF Low Pressure O2/Ar Plasma Using Optical Emission Spectrometry

Measurement of the oxygen dissociation fraction in RF low pressure oxygen/argon plasma using optical emission spectrometry is presented. The oxygen dissociation fraction and its evolutions as functions of operational parameters were determined using argon as the actinometer. At a pressure of 30 Pa,...

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Bibliographic Details
Published inPlasma science & technology Vol. 13; no. 4; pp. 458 - 461
Main Author 刘忠伟 李森 陈强 杨丽珍 王正铎
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.08.2011
Subjects
低压
光谱测量
分数
宾夕法尼亚州
射频
离子发射
解离
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ISSN1009-0630
DOI10.1088/1009-0630/13/4/14

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Summary:Measurement of the oxygen dissociation fraction in RF low pressure oxygen/argon plasma using optical emission spectrometry is presented. The oxygen dissociation fraction and its evolutions as functions of operational parameters were determined using argon as the actinometer. At a pressure of 30 Pa, the oxygen dissociation fraction decreased from 13.4% to 9.5% as the input power increased from 10 W to 70 W. At an input power of 50 W, the oxygen dissociation fraction decreased from 12.3% to 7.7% when the gas pressure increased from 10 Pa to 40 Pa. The influences of operational parameters on the generation of atomic oxygen were also discussed.
Bibliography:LIU Zhongwei , LI Sen ji, CHEN Qiang , YANG Lizhen , WANG Zhengduo （ Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 102600, China）
optical emission spectroscopy, RF O2/Ar plasma, actinometry
34-1187/TL
Measurement of the oxygen dissociation fraction in RF low pressure oxygen/argon plasma using optical emission spectrometry is presented. The oxygen dissociation fraction and its evolutions as functions of operational parameters were determined using argon as the actinometer. At a pressure of 30 Pa, the oxygen dissociation fraction decreased from 13.4% to 9.5% as the input power increased from 10 W to 70 W. At an input power of 50 W, the oxygen dissociation fraction decreased from 12.3% to 7.7% when the gas pressure increased from 10 Pa to 40 Pa. The influences of operational parameters on the generation of atomic oxygen were also discussed.
ISSN:1009-0630
DOI:10.1088/1009-0630/13/4/14