Effects of Ar Ion Sputtering on Surface of ZnO Polycrystalline Thin Films Measured by XPS

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Bibliographic Details
Published inJournal of Surface Analysis Vol. 30; no. 3; p. 207
Main Authors Kawamura, Ayuto, Makino, Hisao
Format Journal Article
LanguageJapanese
Published Tokyo The Surface Analysis Society of Japan 2024
Surface Analysis Society of Japan
Subjects
Thin films
Zinc oxide
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ISSN1341-1756
1347-8400
DOI10.1384/jsa.30.207

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ISSN:1341-1756
1347-8400
DOI:10.1384/jsa.30.207