Total dry electron-beam vacuum lithography system for a rotary encoder

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Published inShinku
Format Journal Article
LanguageEnglish
Japanese
Online AccessGet full text
ISSN1880-9413
0559-8516
DOI10.3131/jvsj.30.391

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BookMark eNotj8FOwzAQRH0oh1I48QP-AFK8dVzHR1RRQKrUSzlHG2dNWzlx5CRF-XscwWk0Gr3RzD1btKElxp5ArCVIeLne-utaJmNgwZZQFCIzOcgl25_CgJ7XceLkyQ4xtFlF2PAb2nFsuL8M5_AdsTtPvJ_6gRruQuTIY-JmqLWhpvjA7hz6nh7_dcW-9m-n3Ud2OL5_7l4PmQUpIDWTS3u2WoFUuatIOFMrvdWkjNF2U89pbsiic1IoW1iDVulKgN4oh7lcsee_3rHtcPpB78suXpq0pARRzlfL-WopkzEgfwGd4U3g
ContentType Journal Article
DBID ADTOC
UNPAY
DOI 10.3131/jvsj.30.391
DatabaseName Unpaywall for CDI: Periodical Content
Unpaywall
Database_xml – sequence: 1
  dbid: UNPAY
  name: Unpaywall
  url: https://proxy.k.utb.cz/login?url=https://unpaywall.org/
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
ExternalDocumentID 10.3131/jvsj.30.391
GroupedDBID ADTOC
ALMA_UNASSIGNED_HOLDINGS
OK1
UNPAY
ID FETCH-LOGICAL-c1301-beef3136751354fbe0f9d5767e5997c2df31349ecaff305c8c9ac57b01725fa43
IEDL.DBID UNPAY
ISSN 1880-9413
0559-8516
IngestDate Thu Aug 28 11:21:03 EDT 2025
IsDoiOpenAccess true
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
Japanese
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-c1301-beef3136751354fbe0f9d5767e5997c2df31349ecaff305c8c9ac57b01725fa43
OpenAccessLink https://proxy.k.utb.cz/login?url=https://www.jstage.jst.go.jp/article/jvsj1958/30/5/30_5_391/_pdf
ParticipantIDs unpaywall_primary_10_3131_jvsj_30_391
PublicationTitle Shinku
Score 1.1596866
SourceID unpaywall
SourceType Open Access Repository
Title Total dry electron-beam vacuum lithography system for a rotary encoder
URI https://www.jstage.jst.go.jp/article/jvsj1958/30/5/30_5_391/_pdf
UnpaywallVersion publishedVersion
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV3PS8MwFA66HTz5AxUVlRz02K5tknU9DnEMweFhg3kqSfoymVs35jqZf73vrZ0MT4KnUpqE8AXe972S9z3G7sIIHDJ55AmpW540znomiDJPagAkVKS4kKqRn3vN7kA-DdVwp4qfrlWOUReNgB7-aOaP540KxMZ49TEmc5SGCKhldZCqVCRhI51nbp_VmwrVeI3VB72X9isFYEV_uNSm-ym5jnkJBuyyRE-EItys5gt8IX_OgyKf6_Wnnkx26KVzxPR2Y-Wtkne_WBrffv3ybPzPzo_ZYaU9ebscfcL2ID9lnf4M9TfPFmu-bYnjGdBTvtK2KKYcZfpbZWvNS9tnjjqXa77AeTQpp6r4xRkbdB77D12vaq7gWaStEFcCJ8ivTYVCSWcgcEmGyUcMKkliG2X0VSZgtXMYE2zLJtqq2FDOqJyW4pzV8lkOF4wrUEYpbWSkWxIikWQgYzDkrBfEEYSX7P4H3XRemmikmHzQKaSETIqAIBxXfxx3zWrLRQE3qAaW5rY68G987ba0
linkProvider Unpaywall
linkToUnpaywall http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV3PS8MwFA66HTz5AxUVlRz02K5tknU9DnEMweFhg3kqSfoymVs35jqZf73vrZ0MT4KnUpqE8AXe972S9z3G7sIIHDJ55AmpW540znomiDJPagAkVKS4kKqRn3vN7kA-DdVwp4qfrlWOUReNgB7-aOaP540KxMZ49TEmc5SGCKhldZCqVCRhI51nbp_VmwrVeI3VB72X9isFYEV_uNSm-ym5jnkJBuyyRE-EItys5gt8IX_OgyKf6_Wnnkx26KVzxPR2Y-Wtkne_WBrffv3ybPzPzo_ZYaU9ebscfcL2ID9lnf4M9TfPFmu-bYnjGdBTvtK2KKYcZfpbZWvNS9tnjjqXa77AeTQpp6r4xRkbdB77D12vaq7gWaStEFcCJ8ivTYVCSWcgcEmGyUcMKkliG2X0VSZgtXMYE2zLJtqq2FDOqJyW4pzV8lkOF4wrUEYpbWSkWxIikWQgYzDkrBfEEYSX7P4H3XRemmikmHzQKaSETIqAIBxXfxx3zWrLRQE3qAaW5rY68G987ba0
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Total+dry+electron-beam+vacuum+lithography+system+for+a+rotary+encoder&rft.jtitle=Shinku&rft.issn=1880-9413&rft_id=info:doi/10.3131%2Fjvsj.30.391&rft.externalDocID=10.3131%2Fjvsj.30.391
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1880-9413&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1880-9413&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1880-9413&client=summon