Nanoscale Structure-Property Relationship in Amorphous Hydrogenated Boron Carbide for Low-k Dielectric Applications

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Bibliographic Details
Published inMicroscopy and microanalysis Vol. 23; no. S1; pp. 1486 - 1487
Main Authors Im, Soohyun, Paquette, Michelle M., Belhadj-Larbi, Mohammed, Rulis, Paul, Sakidja, Ridwan, Hwang, Jinwoo
Format Journal Article
LanguageEnglish
Published New York, USA Cambridge University Press 01.07.2017
Subjects
Characterization of Semiconductor Materials and Devices
Physical Science Symposia
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ISSN1431-9276
1435-8115
DOI10.1017/S1431927617008091

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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927617008091