Optical metrology for precision engineering

This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields.

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Bibliographic Details
Main Authors Gao, Wei, 1965- (Author), Shimizu, Yuki (Author)
Format Electronic eBook
LanguageEnglish
Published Berlin ; Boston : De Gruyter, [2022]
Subjects
Optical measurements.
Metrology.
elektronické knihy
electronic books
Online AccessFull text
ISBN9783110542363
3110542366
3110541270
9783110541274
9783110541090
3110541092
Physical Description1 online resource (XI, 644 pages)

Cover

Table of Contents:
  • Preface
  • Chapter 1 Laser autocollimator
  • Chapter 2 Three-axis angle sensor
  • Chapter 3 Surface encoder
  • Chapter 4 Mosaic encoder
  • Chapter 5 In-line and on-machine surface profiler
  • Chapter 6 Fabrication and calibration of scale grating
  • Chapter 7 Ultrashort-pulse angle sensor
  • Chapter 8 Optical frequency comb
  • Chapter 9 Angle comb
  • Chapter 10 Chromatic confocal comb
  • Chapter 11 Position comb
  • Chapter 12 Optical comb applied metrology.

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