Micro-Nano-Integration ; 7th GMM-Workshop : 22-23 Oct. 2018.

• Corporate Authors: GMM Workshop "Mikro-Nano-Integration" Dortmund, Germany, VDE/VDI-Gesellschaft Mikroelektronik, Mikrosystem- und Feinwerktechnik, Institute of Electrical and Electronics Engineers
• Format: Electronic eBook
• Language: English
• Published: Berlin, Germany : [VDE Verlag], [2018?]
• Subjects: Nanostructures > Congresses.; Microelectronics > Congresses.; elektronické knihy; electronic books
• ISBN: 1523126728; 9781523126729; 9783800747894; 3800747898
• Physical Description: 1 online resource (various pagings) : illustrations