Principles of lithography

"This text is intended to serve as an introduction to the science of microlithography, but also covers several subjects in depth, making it useful to the experienced lithographer as well. Topics directly related to manufacturing tools are addressed, including overlay, the stages of exposure, to...

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Bibliographic Details
Main Author Levinson, Harry J. (Author)
Format Electronic eBook
LanguageEnglish
Published Bellingham, Washington, USA : SPIE Press, [2019]
EditionFourth edition.
Subjects
Integrated circuits > Design and construction.
Microlithography.
elektronické knihy
electronic books
Online AccessFull text
ISBN9781510627611
1510627618
9781510627628
1510627626
9781510627635
1510627634
9781510627604
151062760X
Physical Description1 online resource

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Table of Contents:
  • Overview of lithography
  • Optical pattern formation
  • Photoresists
  • Modeling and thin-film effects
  • Wafer steppers and scanners
  • Overlay
  • Masks and reticles
  • Confronting the diffraction limit
  • Metrology
  • Immersion lithography and the limits of optical lithography
  • Lithography costs
  • Extreme ultraviolet lithography
  • Alternative lithography techniques.

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