Developments in surface contamination and cleaning. Volume 7, Cleanliness validation and verification /

As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning a...

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Bibliographic Details
Other Authors: Kohli, Rajiv, 1947- (Editor), Mittal, K. L., 1945- (Editor)
Format: eBook
Language: English
Published: Amsterdam : Elsevier, 2015.
Edition: First edition.
Subjects:
Surfaces (Technology)
Surface contamination > Prevention.
Cleaning.
elektronické knihy
electronic books
ISBN: 9780323311458
0323311458
0323313035
9780323313032
Physical Description: 1 online resource (207 pages)

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Table of contents

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007 cr cn|||||||||
008 141122s2015 ne ob 001 0 eng d
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020 |a 9780323311458  |q (electronic bk.) 
020 |a 0323311458  |q (electronic bk.) 
020 |a 0323313035 
020 |a 9780323313032 
035 |a (OCoLC)896794457  |z (OCoLC)899000184  |z (OCoLC)910709124 
245 0 0 |a Developments in surface contamination and cleaning.  |n Volume 7,  |p Cleanliness validation and verification /  |c edited by Rajiv Kohli and K.L. Mittal. 
250 |a First edition. 
264 1 |a Amsterdam :  |b Elsevier,  |c 2015. 
300 |a 1 online resource (207 pages) 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
504 |a Includes bibliographical references and index. 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty 
520 |a As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters in this Volume address the sources of surface contaminants and various methods for their collection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control, these books will be an invaluable reference for researchers and engineers in R & D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography. 
590 |a Knovel  |b Knovel (All titles) 
650 0 |a Surfaces (Technology) 
650 0 |a Surface contamination  |x Prevention. 
650 0 |a Cleaning. 
655 7 |a elektronické knihy  |7 fd186907  |2 czenas 
655 9 |a electronic books  |2 eczenas 
700 1 |a Kohli, Rajiv,  |d 1947-  |e editor.  |1 https://id.oclc.org/worldcat/entity/E39PCjBqbg9Mq49gfg3G9g8Ttq 
700 1 |a Mittal, K. L.,  |d 1945-  |e editor.  |1 https://id.oclc.org/worldcat/entity/E39PCjKv8H9WwJxmb89dhKchpd 
776 0 8 |i Print version:  |a Kohli, Rajiv.  |t Developments in Surface Contamination and Cleaning : Cleanliness Validation and Verification.  |d Burlington : Elsevier Science, ©2014  |z 9780323313032 
856 4 0 |u https://proxy.k.utb.cz/login?url=https://app.knovel.com/hotlink/toc/id:kpDSCCVCV1/developments-in-surface?kpromoter=marc  |y Full text 

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