Hermeticity testing of MEMS and microelectronic packages

• Main Authors: Costello, Suzanne, (Author), Desmulliez, Marc P. Y., 1963- (Author)
• Format: eBook
• Language: English
• Published: Boston : Artech House, [2013]
• Series: Artech House integrated microsystems series.
• Subjects: Microelectronic packaging > Testing.; Microelectromechanical systems > Testing.; Hermetic sealing > Testing.; Microelectronics > Testing.; elektronické knihy; electronic books
• ISBN: 9781608075287; 1608075281; 9781523117284; 1523117281; 9781608075270; 1608075273
• Physical Description: 1 online resource (195 pages .)
• Access: Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty

Packaging of microelectronics has been developing since the invention of the transistor in 1947. With the increasing complexity and decreasing size of the die, packaging requirements have continued to change. A step change in package requirements came with the introduction of the Micro-Electro-Mechanical System (MEMS) whereby interactions with the external environment are, in some cases, required. This resource is a rapid, definitive reference on hermetic packaging for the MEMS and microelectronics industry, giving practical guidance on traditional and newly developed test methods. This book in.