Silicon-on-insulator (SOI) technology : manufacture and applications

Silicon-on-insulator (SOI) is a semiconductor wafer technology that produces higher performing, lower power devices than traditional bulk silicon techniques. SOI works by placing a thin, insulating layer, such as silicon oxide between a thin layer of silicon and the silicon substrate. This process h...

Full description

Saved in:
Bibliographic Details
Other Authors Kononchuk, Oleg, Nguyen, Bich-Yen
Format Electronic eBook
LanguageEnglish
Published Cambridge, UK ; Waltham, MA : Woodhead Pub., 2014.
SeriesWoodhead Publishing series in electronic and optical materials.
Subjects
Silicon-on-insulator technology.
elektronické knihy
electronic books
Online AccessFull text
ISBN9780857099259
0857099256
1306949130
9781306949132
0857095269
9780857095268
Physical Description1 online resource : illustrations

Cover

LEADER 00000cam a2200000 a 4500
001 kn-ocn888415348
003 OCoLC
005 20240717213016.0
006 m o d
007 cr cn|||||||||
008 140822s2014 enka ob 001 0 eng d
040 |a UMI  |b eng  |e pn  |c UMI  |d UIU  |d YDXCP  |d IDEBK  |d CDX  |d E7B  |d DEBBG  |d DEBSZ  |d COO  |d OCLCF  |d VLB  |d OCLCQ  |d ZCU  |d OCLCQ  |d EBLCP  |d N$T  |d OPELS  |d KNOVL  |d VT2  |d OCLCQ  |d OCL  |d U3W  |d REB  |d D6H  |d CEF  |d RRP  |d UAB  |d MERER  |d OCLCQ  |d AU@  |d LQU  |d OCLCQ  |d OCL  |d OCLCQ  |d S2H  |d OCLCO  |d OCLCQ  |d OCLCO  |d OCLCL 
020 |a 9780857099259 
020 |a 0857099256 
020 |a 1306949130  |q (ebk) 
020 |a 9781306949132  |q (ebk) 
020 |a 0857095269 
020 |a 9780857095268 
020 |z 9780857095268 
035 |a (OCoLC)888415348  |z (OCoLC)881887848  |z (OCoLC)883893077  |z (OCoLC)1105170274  |z (OCoLC)1105575224 
245 0 0 |a Silicon-on-insulator (SOI) technology :  |b manufacture and applications /  |c edited by Oleg Kononchuk, Bich-Yen Nguyen. 
260 |a Cambridge, UK ;  |a Waltham, MA :  |b Woodhead Pub.,  |c 2014. 
300 |a 1 online resource :  |b illustrations 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
490 1 |a Woodhead Publishing series in electronic and optical materials 
504 |a Includes bibliographical references and index. 
505 0 |a Cover; Silicon-on-insulator (SOI) Technology : Manufacture and Applications; Copyright; Contents; Contributor contact details; Woodhead Publishing Series in Electronic and Optical Materials; Introduction; Part I:Silicon-on-insulator (SOI) materials and manufacture; 1:Materials and manufacturing techniques for silicon-on-insulator (SOI) wafer technology; 1.1 Introduction; 1.2 SOI wafer fabrication technologies: an overview; 1.3 SOI volume-fabrication process; 1.4 SOI wafer structures and characterization; 1.5 Direct wafer bonding: wet surface cleaning techniques. 
505 8 |a 1.6 Characterization of direct bonding mechanisms1.7 Alternative surface preparation processes for Si and SiO2 direct bonding; 1.8 Mass production of SOI substrates by ion implantation, bonding and splitting: Smart Cut TM technology; 1.9 Fabrication of more complex SOI structures; 1.10 Fabrication of heterogeneous structures; 1.11 Conclusion; 1.12 Acknowledgments; 1.13 References; 2:Characterization of the electrical properties of advanced silicon-on-insulator (SOI) materials and transistors; 2.1 Introduction; 2.2 Conventional characterization techniques. 
505 8 |a 2.3 Characterization of SOI wafers using the pseudo-metal oxide semiconductor field effect transister (MOSFET) technique2.4 Developments in the pseudo-MOSFET technique; 2.5 Conventional methods for the characterization of FD MOSFETs; 2.6 Advanced methods for the characterization of FD MOSFETs; 2.7 Characterization of ultrathin SOI MOSFETs; 2.8 Characterization of multiple-gate MOSFETs; 2.9 Characterization of nanowire FETs; 2.10 Conclusions; 2.11 Acknowledgments; 2.12 References. 
505 8 |a 3: Modeling the performance of short-channel fully depleted silicon-on-insulator (SOI) metal oxide semiconductor field effect transistors (MOSFETs)3.1 Introduction; 3.2 The development of SOI MOSFET modeling; 3.3 A 1-D compact capacitive model for a SOI MOSFET; 3.4 A 2-D analytical model for a SOI MOSFET; 3.5 Modeling of dual gate and other types of SOI MOSFET architecture; 3.6 References; 4:Partially depleted (PD) silicon-on-insulator (SOI) technology: circuit solutions; 4.1 Introduction; 4.2 PDSOI technology and devices; 4.3 Circuit solutions: digital circuits. 
505 8 |a 4.4 Circuit solutions: static random access memory (SRAM) circuits4.5 SRAM margining: PDSOI example; 4.6 Future trends; 4.7 References; 5:Planar fully depleted (FD) silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) technology; 5.1 Introduction; 5.2 Planar FDSOI technology; 5.3 VT adjustment on FDSOI: channel doping, gate stack engineering and ground planes; 5.4 Substrate requirements for FDSOI CMOS devices: BOX and channel thicknesses; 5.5 Strain options on FDSOI; 5.6 Performance without and with back bias; 5.7 Conclusion; 5.8 Acknowledgements; 5.9 References. 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty 
520 |a Silicon-on-insulator (SOI) is a semiconductor wafer technology that produces higher performing, lower power devices than traditional bulk silicon techniques. SOI works by placing a thin, insulating layer, such as silicon oxide between a thin layer of silicon and the silicon substrate. This process helps reduce junction capacitance, resulting in higher speed and lower power consumption. SOI chips can be as much as 15 percent faster and use 20 percent less power than today's silicon complementary metal-oxide semiconductor (CMOS)-based chips. Part one covers SOI transistors and circuits, manufact. 
590 |a Knovel  |b Knovel (All titles) 
650 0 |a Silicon-on-insulator technology. 
655 7 |a elektronické knihy  |7 fd186907  |2 czenas 
655 9 |a electronic books  |2 eczenas 
700 1 |a Kononchuk, Oleg. 
700 1 |a Nguyen, Bich-Yen. 
776 0 8 |i Print version:  |z 9781306949132 
830 0 |a Woodhead Publishing series in electronic and optical materials. 
856 4 0 |u https://proxy.k.utb.cz/login?url=https://app.knovel.com/hotlink/toc/id:kpSOISOIT5/silicon-on-insulator?kpromoter=marc  |y Full text 

Similar Items