Ultra clean processing of semiconductor surfaces XI : selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium

• Corporate Author: International Symposium on Ultra Clean Processing of Semiconductor Surfaces Ghent, Belgium
• Other Authors: Heyns, Marc, Mertens, Paul, Meuris, Marc
• Format: Electronic eBook
• Language: English
• Published: Durnten-Zurich, Switzerland : Trans Tech Publications Ltd., [2013]
• Series: Diffusion and defect data. Solid state phenomena ; v. 195.
• Subjects: Electrical engineering > Congresses.; Semiconductors > Surfaces > Congresses.; elektronické knihy; electronic books
• ISBN: 9783038139089; 3038139084; 9781680151091; 1680151096; 9783037855270; 3037855274
• ISSN: 1012-0394 ;
• Physical Description: 1 online resource (328 pages) : illustrations (black and white)

This volume covers various aspects of ultra-clean technology for the large-scale integration of semiconductors. These include cleaning and contamination control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing, as well as cleaning for semiconductor photo-voltaic applications....