NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore
The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processe...
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| Corporate Author: | |
|---|---|
| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Durnten-Zurich ; Enfield, NH :
Trans Tech,
©2011.
©2011 |
| Series: | Advanced materials research ;
v. 254. |
| Subjects: | |
| ISBN: | 9783038136095 3038136093 9781621986850 1621986853 9783037851456 3037851457 |
| Physical Description: | 1 online resource (x, 229 pages) : illustrations (some color) |
Cover
Table of contents
| LEADER | 05630cam a2200505 a 4500 | ||
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| 001 | kn-ocn811787329 | ||
| 003 | OCoLC | ||
| 005 | 20240717213016.0 | ||
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| 008 | 121003s2011 sz a ob 101 0 eng d | ||
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| 020 | |a 9783038136095 |q (electronic bk.) | ||
| 020 | |a 3038136093 |q (electronic bk.) | ||
| 020 | |a 9781621986850 |q (electronic bk.) | ||
| 020 | |a 1621986853 |q (electronic bk.) | ||
| 020 | |z 9783037851456 | ||
| 020 | |z 3037851457 | ||
| 035 | |a (OCoLC)811787329 |z (OCoLC)836848917 |z (OCoLC)961658224 |z (OCoLC)962640381 |z (OCoLC)1055397973 |z (OCoLC)1065650536 |z (OCoLC)1081213803 |z (OCoLC)1162051120 |z (OCoLC)1202549118 |z (OCoLC)1224942857 |z (OCoLC)1241822150 |z (OCoLC)1290040664 |z (OCoLC)1300590912 | ||
| 111 | 2 | |a International Conference on Materials for Advanced Technologies |d (2011 : |c Singapore) | |
| 245 | 1 | 0 | |a NEMS/MEMS technology and devices : |b selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / |c edited by Lynn Khine and Julius M. Tsai. |
| 260 | |a Durnten-Zurich ; |a Enfield, NH : |b Trans Tech, |c ©2011. | ||
| 264 | 4 | |c ©2011 | |
| 300 | |a 1 online resource (x, 229 pages) : |b illustrations (some color) | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a Advanced materials research, |x 1022-6680 ; |v v. 254 | |
| 504 | |a Includes bibliographical references and indexes. | ||
| 505 | 0 | |a NEMS/MEMS Technology and Devices, ICMAT2011; Preface; Table of Contents; Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors; Thick-Film Deposition of High-Viscous Liquid Photopolymer; Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application; Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever; Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure; Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force. | |
| 505 | 8 | |a A Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS Capacitor; GEMS: A MEMS-Based Way for the Innervation of Materials; On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems; Design Consideration of Membrane Structure for Thermal Actuated Micropump; Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator; Fabrication of a Peltier Device Based on InSb and SbTe Thin Films; Gapfill Study of Polyimides for MEMS Applications. | |
| 505 | 8 | |a A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications; Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator; FBAR Resonators with Sufficient High Q for RF Filter Implementation; Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators; Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis; Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement. | |
| 505 | 8 | |a Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial Thermocouple; A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device; Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography; Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches; Double-Step Plasma Etching for SiO2 Microcantilever Release; Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators. | |
| 506 | |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty | ||
| 520 | |a The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic. Review from Book News Inc.: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applicati. | ||
| 590 | |a Knovel |b Knovel (All titles) | ||
| 650 | 0 | |a Nanoelectromechanical systems |v Congresses. | |
| 650 | 0 | |a Microelectromechanical systems |v Congresses. | |
| 655 | 7 | |a elektronické knihy |7 fd186907 |2 czenas | |
| 655 | 9 | |a electronic books |2 eczenas | |
| 700 | 1 | |a Khine, Lynn, |e editor. | |
| 700 | 1 | |a Tsai, Julius M., |e editor. | |
| 776 | 0 | 8 | |i Print version: |a International Conference on Materials for Advanced Technologies (2011 : Singapore). |t NEMS/MEMS technology and devices. |d Durnten-Zurich ; Enfield, NH : Trans Tech, ©2011 |z 9783037851456 |w (OCoLC)751790683 |
| 830 | 0 | |a Advanced materials research ; |v v. 254. | |
| 856 | 4 | 0 | |u https://proxy.k.utb.cz/login?url=https://app.knovel.com/hotlink/toc/id:kpNEMSMEM1/nems-mems-technology?kpromoter=marc |y Full text |
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