Handbook of thin film deposition : techniques, processes, and technologies

• Other Authors: Seshan, Krishna.
• Format: eBook
• Language: English
• Published: Waltham [Mass.] : William Andrew, 2012.
• Edition: 3rd ed.
• Subjects: Thin film devices > Design and construction > Handbooks, manuals, etc.; Thin films.; Thin film devices > Design and construction.; elektronické knihy; electronic books
• ISBN: 1437778747; 9781437778748; 9781437778731; 1437778739; 1283716895; 9781283716895
• Physical Description: 1 online resource (xviii, 392 pages)
• Access: Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty

The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical depo.