Introduction to semiconductor manufacturing technology

• Main Author: Xiao, Hong, 1961-
• Corporate Author: Society of Photo-Optical Instrumentation Engineers
• Format: Electronic eBook
• Language: English
• Published: Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE Press, [2012]
• Edition: Second edition.
• Series: SPIE monograph ; PM220.
• Subjects: Integrated circuits > Design and construction.; Semiconductors > Design and construction.; Semiconductor industry.; elektronické knihy; electronic books
• ISBN: 9780819490933; 0819490938; 9781628701043; 1628701048; 9780819490926; 081949092X
• Physical Description: 1 online resource (xix, 656 pages) : illustrations

Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technologies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs tod...