Advances in CMP/polishing technologies for the manufacture of electronic devices
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| Other Authors | , , |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Oxford :
Elsevier,
2012.
|
| Edition | 1st ed. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9781437778601 1437778607 9781437778595 1437778593 |
| Physical Description | 1 online resource (xii, 317 pages) : illustrations, color portraits |
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