A guide to hands-on MEMS design and prototyping

"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fa...

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Bibliographic Details
Main Author: Kubby, Joel A.
Format: eBook
Language: English
Published: Cambridge, UK ; New York : Cambridge University Press, 2011.
Subjects:
Microelectromechanical systems.
elektronické knihy
electronic books
ISBN: 9781139109895
1139109898
9781139127080
113912708X
9780511984662
0511984669
9781139114257
1139114255
9781139116428
1139116428
9781139122160
1139122169
1283295601
9781283295604
9786613295606
6613295604
1139112066
9781139112062
1139124110
9781139124119
1107219361
9781107219366
9780521889254
0521889251
9781107645790
1107645794
Physical Description: 1 online resource (xi, 166 pages, 16 unnumbered pages of plates) : illustrations (some color)

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Table of contents

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100 1 |a Kubby, Joel A. 
245 1 2 |a A guide to hands-on MEMS design and prototyping /  |c Joel Kubby. 
260 |a Cambridge, UK ;  |a New York :  |b Cambridge University Press,  |c 2011. 
300 |a 1 online resource (xi, 166 pages, 16 unnumbered pages of plates) :  |b illustrations (some color) 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
504 |a Includes bibliographical references and index. 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty 
520 |a "Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"--  |c Provided by publisher 
505 0 |a Preface; 1 Introduction; 2 Micromechanics; 3 Electrostatic Actuation; 4 Optical MEMS; 5 Thermal MEMS; 6 Fluidic MEMS; 7 Package and Test; 8 From Prototype to Product: MEMS Deformable Mirrors for Adaptive Optics. 
590 |a Knovel  |b Knovel (All titles) 
650 0 |a Microelectromechanical systems. 
655 7 |a elektronické knihy  |7 fd186907  |2 czenas 
655 9 |a electronic books  |2 eczenas 
776 0 8 |i Print version:  |a Kubby, Joel A.  |t Guide to hands-on MEMS design and prototyping.  |d Cambridge, UK ; New York : Cambridge University Press, 2011  |z 9780521889254  |w (DLC) 2011004247  |w (OCoLC)703621184 
856 4 0 |u https://proxy.k.utb.cz/login?url=https://app.knovel.com/hotlink/toc/id:kpGHMEMSD1/guide-to-hands?kpromoter=marc  |y Full text 

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