Fabrication engineering at the micro and nanoscale

• Main Author: Campbell, Stephen A., 1954-
• Format: eBook
• Language: English
• Published: New York : Oxford University Press, 2008.
• Edition: 3rd ed.
• Series: Oxford series in electrical and computer engineering.
• Subjects: Semiconductors > Design and construction.; Semiconductors > Mathematical models.; Microelectronics.; Nanoelectronics.; elektronické knihy; electronic books
• ISBN: 9781613441107; 161344110X; 9780195320176; 0195320174
• Physical Description: 1 online resource (xiv, 647 pages) : illustrations