Fabrication engineering at the micro and nanoscale
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| Main Author | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
New York :
Oxford University Press,
2008.
|
| Edition | 3rd ed. |
| Series | Oxford series in electrical and computer engineering.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 9781613441107 161344110X 9780195320176 0195320174 |
| Physical Description | 1 online resource (xiv, 647 pages) : illustrations |
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