Developments in surface contamination and cleaning. Volume three, Methods for removal of particle contaminants /

• Other Authors: Kohli, Rajiv, Mittal, Kashmiri L.
• Format: Electronic eBook
• Language: English
• Published: Oxford ; Burlington, MA : William Andrew, ©2011.
• Edition: 1st ed.
• Subjects: Surfaces (Technology); Surface contamination > Prevention.; Particles > Measurement.; Cleaning.; Coatings.; Dust control.; elektronické knihy; electronic books
• ISBN: 9781437778861; 1437778860; 1437778852; 9781437778854; 9781283171441; 1283171449
• Physical Description: 1 online resource

The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate mater...