Physics of radio-frequency plasmas

"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on phy...

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Bibliographic Details
Main Author Chabert, Pascal, 1969-
Other Authors Braithwaite, Nicholas
Format Electronic eBook
LanguageEnglish
Published Cambridge ; New York : Cambridge University Press, 2011.
Subjects
Low temperature plasmas.
Radio frequency.
elektronické knihy
electronic books
Online AccessFull text
ISBN9780511861017
051186101X
9780511974342
0511974345
9780511856662
0511856660
9780521763004
0521763002
Physical Description1 online resource (viii, 385 pages) : illustrations

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TOC from ObalkyKnih.cz
Table of Contents:
  • 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements.

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