Physics of radio-frequency plasmas

"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on phy...

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Bibliographic Details
Main Author: Chabert, Pascal, 1969-
Other Authors: Braithwaite, Nicholas
Format: eBook
Language: English
Published: Cambridge ; New York : Cambridge University Press, 2011.
Subjects:
Low temperature plasmas.
Radio frequency.
elektronické knihy
electronic books
ISBN: 9780511861017
051186101X
9780511974342
0511974345
9780511856662
0511856660
9780521763004
0521763002
Physical Description: 1 online resource (viii, 385 pages) : illustrations

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Table of contents

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100 1 |a Chabert, Pascal,  |d 1969-  |1 https://id.oclc.org/worldcat/entity/E39PCjKcWdWbKk3pXMWDyjPBpq 
245 1 0 |a Physics of radio-frequency plasmas /  |c Pascal Chabert, Nicholas Braithwaite. 
260 |a Cambridge ;  |a New York :  |b Cambridge University Press,  |c 2011. 
300 |a 1 online resource (viii, 385 pages) :  |b illustrations 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty 
520 |a "Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics, including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations"--  |c Provided by publisher 
504 |a Includes bibliographical references (pages 375-382) and index. 
505 0 |a 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements. 
590 |a Knovel  |b Knovel (All titles) 
650 0 |a Low temperature plasmas. 
650 0 |a Radio frequency. 
655 7 |a elektronické knihy  |7 fd186907  |2 czenas 
655 9 |a electronic books  |2 eczenas 
700 1 |a Braithwaite, Nicholas  |q (Nicholas St. J.)  |1 https://id.oclc.org/worldcat/entity/E39PCjBwMp74JJqjkVKCD4F4YP 
776 0 8 |i Print version:  |a Chabert, Pascal, 1969-  |t Physics of Radio-Frequency Plasmas.  |d Cambridge ; New York : Cambridge University Press, 2011, ©2011  |z 9780521763004  |w (DLC) 2010042728  |w (OCoLC)651917375 
856 4 0 |u https://proxy.k.utb.cz/login?url=https://app.knovel.com/hotlink/toc/id:kpPRFP0003/physics-of-radio?kpromoter=marc  |y Full text 

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