Physics of radio-frequency plasmas
"Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on phy...
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Main Author: | |
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Other Authors: | |
Format: | eBook |
Language: | English |
Published: |
Cambridge ; New York :
Cambridge University Press,
2011.
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Subjects: | |
ISBN: | 9780511861017 051186101X 9780511974342 0511974345 9780511856662 0511856660 9780521763004 0521763002 |
Physical Description: | 1 online resource (viii, 385 pages) : illustrations |
Summary: | "Low-temperature radio-frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics, including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations"-- |
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Bibliography: | Includes bibliographical references (pages 375-382) and index. |
ISBN: | 9780511861017 051186101X 9780511974342 0511974345 9780511856662 0511856660 9780521763004 0521763002 |
Access: | Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty |