Lithography process control
This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process...
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| Main Author | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Bellingham, Wash. :
SPIE Optical Engineering Press,
©1999.
|
| Series | Tutorial texts in optical engineering ;
v. TT 28. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9781615837366 1615837361 9780819478559 0819478555 9780819430526 0819430528 |
| Physical Description | 1 online resource (x, 190 pages) : illustrations |
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