Smart mems and sensor systems

• Main Author: Gaura, Elena.
• Other Authors: Newman, Robert M.
• Format: eBook
• Language: English
• Published: London : Imperial College Press, ©2006.
• Series: Online access with JISC subscription agreement: Knovel.; Catalogued Knovel SJ.
• Subjects: Microelectromechanical systems.; Smart structures.; elektronické knihy; electronic books
• ISBN: 1860949207; 9781860949203; 160119269X; 9781601192691; 9781601198877; 1601198876; 128186739X; 9781281867391; 9786611867393; 6611867392; 1860944930; 9781860944932
• Physical Description: 1 online resource (xii, 539 pages) : illustrations

In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. Smart MEMS and Sensor Systems presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a unique systems perspective...