Handbook of silicon based MEMS : materials & technologies

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materi...

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Bibliographic Details
Other Authors: Lindroos, Veikko.
Format: eBook
Language: English
Published: Norwich, N.Y. : Oxford : William Andrew ; Elsevier Science [distributor], 2010.
Series: Micro & nano technologies.
Subjects:
Microelectromechanical systems.
Microelectromechanical systems > Materials.
Silicon > Electric properties.
elektronické knihy
electronic books
ISBN: 9780815515944
0815515944
1282541145
9781282541146
9780815519881
0815519885
Physical Description: 1 online resource

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Table of contents

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007 cr cn|||||||||
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020 |a 9780815515944 
020 |a 0815515944 
020 |a 1282541145 
020 |a 9781282541146 
020 |a 9780815519881 
020 |a 0815519885 
035 |a (OCoLC)528581495  |z (OCoLC)742297520  |z (OCoLC)748362337  |z (OCoLC)816375864  |z (OCoLC)824491113  |z (OCoLC)827175027  |z (OCoLC)968099798  |z (OCoLC)969031861  |z (OCoLC)1102534262 
245 0 0 |a Handbook of silicon based MEMS :  |b materials & technologies /  |c by Veikko Lindroos [and others]. 
260 |a Norwich, N.Y. :  |b William Andrew ;  |a Oxford :  |b Elsevier Science [distributor],  |c 2010. 
300 |a 1 online resource 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
490 1 |a Micro & nano technologies 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty 
520 |a A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R & D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. . Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques . Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs . Discusses properties, preparation, and growth of silicon crystals and wafers . Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures. 
505 0 |a Silicon as MEMS Material -- Modeling in MEMS -- Measuring MEMS -- Micromachining Technologies in MEMS -- Encapsulation of MEMS Components. 
504 |a Includes bibliographical references and index. 
590 |a Knovel  |b Knovel (All titles) 
650 0 |a Microelectromechanical systems. 
650 0 |a Microelectromechanical systems  |x Materials. 
650 0 |a Silicon  |x Electric properties. 
655 7 |a elektronické knihy  |7 fd186907  |2 czenas 
655 9 |a electronic books  |2 eczenas 
700 1 |a Lindroos, Veikko. 
776 0 8 |i Print version:  |t Handbook of silicon based MEMS.  |d Norwich, N.Y. : William Andrew ; Oxford : Elsevier Science [distributor], 2010  |z 9780815515944  |z 0815515944  |w (OCoLC)428777214 
830 0 |a Micro & nano technologies. 
856 4 0 |u https://proxy.k.utb.cz/login?url=https://app.knovel.com/hotlink/toc/id:kpHSBMEMS3/handbook-of-silicon?kpromoter=marc  |y Full text 

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