Handbook of ellipsometry
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated c...
Saved in:
| Other Authors | , |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Norwich, NY : Heidelberg, Germany :
William Andrew Pub. ; Springer,
©2005.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 0815514999 9780815514992 3540222936 9783540222934 1591248493 9781591248491 9780815517467 0815517467 |
| Physical Description | 1 online resource (xvi, 870 pages) : illustrations |
Glossary of Terms