Micro mechanical systems : principles and technology
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution...
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| Other Authors: | , |
|---|---|
| Format: | eBook |
| Language: | English |
| Published: |
Amsterdam ; New York :
Elsevier,
1998.
|
| Series: | Handbook of sensors and actuators ;
v. 6. |
| Subjects: | |
| ISBN: | 9780080536545 0080536549 9780444823632 0444823638 1282284975 9781282284975 9786612284977 6612284978 |
| Physical Description: | 1 online resource (viii, 268 pages) : illustrations |
Cover
Table of contents
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| 020 | |a 1282284975 | ||
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| 020 | |a 9786612284977 | ||
| 020 | |a 6612284978 | ||
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| 245 | 0 | 0 | |a Micro mechanical systems : |b principles and technology / |c edited by T. Fukuda and W. Menz. |
| 260 | |a Amsterdam ; |a New York : |b Elsevier, |c 1998. | ||
| 300 | |a 1 online resource (viii, 268 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a Handbook of sensors and actuators ; |v v. 6 | |
| 504 | |a Includes bibliographical references. | ||
| 506 | |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty | ||
| 520 | |a In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems. | ||
| 505 | 0 | |a Front Cover; Micro Mechanical Systems: Principles and Technology; Copyright Page; Contents; Chapter 1. Introduction; Historical Background and Parallels to Microelectronics; The Motivation for Microsystem Technology; Microphysics and Design Considerations; From the Microcomponent to the Microsystem; Chapter 2. Photolithographic Microfabrication; Basic Concepts of Planar Processing; Materials; Unit Processes; Integrated Processes; Limitations of Planar Processes; Chapter 3. Micromachining by Machine Tools; Historical Aspects; Basics of Micromachine Tools; Microtool Preparation. | |
| 505 | 8 | |a Wire Electrodischarge Grinding (WEDG)Micro EDM; Micro Mechanical Machining (MMM); Combined Method for Micromachining; Chapter 4. Tribological Aspects of Microsystems; Introduction; Tribology -- Friction, Lubrication and Wear; Surface Structure and Tribilogical Contact; Friction and Wear; Materials for Reliable Micromechanical Systems; Chapter 5. Silicon Microsensors; Introduction; Fabrication; Performance of Micromechanical Sensors; Examples of Micromechanical Sensors; Chapter 6. Micro-Actuators for Micro-Robots: Electric and Magnetic; Introduction; Electric Field Driven Actuators. | |
| 505 | 8 | |a Piezoelectric ActuatorsMechanical Transformers; Magnetic Field Driven Actuators; Chapter 7. Energy Source and Power Supply Method; Classification of Energy Supply Methods; Internal Supply Methods; External Supply Methods and Noncontact Manipulation; The Others; Chapter 8. Control Method of Micro Mechanical Systems; Control Principle; Scaling Effects; Intelligent Control; Man-Machine Interface; Chapter 9. Examples of Microsystems; Introduction; Examples of Microsystems; Examples of Micromachines; Chapter 10. Future Problems; The Complete Microsystem. | |
| 505 | 8 | |a The Industrial Potential of Microsystem TechnologyThe Importance of Standardization; Outlook. | |
| 590 | |a Knovel |b Knovel (All titles) | ||
| 650 | 0 | |a Microelectromechanical systems |v Handbooks, manuals, etc. | |
| 655 | 7 | |a elektronické knihy |7 fd186907 |2 czenas | |
| 655 | 9 | |a electronic books |2 eczenas | |
| 700 | 1 | |a Fukuda, T. |q (Toshio), |d 1948- |1 https://id.oclc.org/worldcat/entity/E39PBJppBxdm6kXfyXGMyvRkDq | |
| 700 | 1 | |a Menz, W. |q (Wolfgang) |1 https://id.oclc.org/worldcat/entity/E39PCjJf8dQxT9YygFybhX6VG3 | |
| 776 | 0 | 8 | |i Print version: |t Micro mechanical systems. |d Amsterdam ; New York : Elsevier, 1998 |z 9780444823632 |w (DLC) 98020529 |w (OCoLC)39122892 |
| 830 | 0 | |a Handbook of sensors and actuators ; |v v. 6. | |
| 856 | 4 | 0 | |u https://proxy.k.utb.cz/login?url=https://app.knovel.com/hotlink/toc/id:kpMMSPT001/micro-mechanical-systems?kpromoter=marc |y Full text |
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