Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis

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Bibliographic Details
Other Authors Cuomo, J. J., Rossnagel, Stephen M., Kaufman, Harold R.
Format Electronic eBook
LanguageEnglish
Published Westwood, N.J. : Noyes Publications, ©1989.
EditionReprint ed.
Subjects
Ion implantation.
Ion bombardment > Industrial applications.
elektronické knihy
electronic books
Online AccessFull text
ISBN1591249791
9781591249795
Physical Description1 online resource (xviii, 438 pages) : illustrations

Cover

Table of Contents:
  • Perspective on past, present and future uses of ion beam technology / Jerome J. Cuomo, Stephen M. Rossnagel and Harold R. Kaufman
  • Gridded broad-beam ion sources / Harold R. Kaufman and Raymond S. Robinson
  • Electron cyclotron resonance (ECR) ion sources / William M. Holber
  • Hall effect ion sources / Raymond S. Robinson and Harold R. Kaufman
  • Ionized cluster bean (ICB) deposition and epitaxy / Isao Yamada and Toshinori Takagi
  • Quantitative sputtering / Peer C. Zalm
  • Laser- induced fluorescence as a tool for the study of ion beam sputtering / Wallis F. Calaway [and others]
  • Characterization of atoms desorbed from surfaces by ion bombardment using multiphoton ionization detection / David L. Pappas, Nicholas Winograd and Fred M. Kimock.
  • The application of positionization for sputtering studies and surface or thin film analysis / Hans Oechsner
  • The modification of films by ion bombardment / Eric Kay and Stephen M. Rossnagel
  • Control of film properties by ion-assisted deposition using broad beam sources / Ronnen A. Roy and Dennis S. Yee
  • Etching with directed beams / Michael Geis [and others]
  • Film growth modification by concurrent ion bombardment : theory and simulation / Karl-Heinz Muller
  • Interface structure and thin film adhesion / John Baglin
  • Modification of thin films by off-normal incidence ion bombardment / R. Mark Bradley
  • Ion beam interactions with polymer surfaces / Robert C. White and Paul S. Ho.
  • Topography : texturing effects / Bruce A. Banks
  • Methods and techniques of ion beam processes / Stephen M. Rossnagel
  • Ion-assisted dielectric and optical coatings / Phil J. Martin and Roger P. Netterfield
  • Diamond and diamond-like thin films by ion beam techniques / Makoto Kitabatake and Kiyotaka Wasa.

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