Characterization in silicon processing

This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to consider each of the types of films used in silicon devices individually in its own chapter and to disc...

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Bibliographic Details
Other Authors: Strausser, Yale.
Format: eBook
Language: English
Published: Boston : Greenwich : Butterworth-Heinemann ; Manning, ©1993.
Series: Materials characterization series.
Subjects:
Silicon.
Electric conductors.
Semiconductor films.
Surface chemistry.
elektronické knihy
electronic books
ISBN: 1591245257
9781591245254
9780080523422
0080523420
9780750691727
0750691727
Physical Description: 1 online resource (xiii, 240 pages) : illustrations

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Table of contents

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042 |a dlr 
245 0 0 |a Characterization in silicon processing /  |c editor, Yale Strusser ; consulting editors, C.R. Brundle, Gary E. McGuire ; managing editor, Lee E. Fitzpatrick. 
260 |a Boston :  |b Butterworth-Heinemann ;  |a Greenwich :  |b Manning,  |c ©1993. 
300 |a 1 online resource (xiii, 240 pages) :  |b illustrations 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
490 1 |a Materials characterization series 
504 |a Includes bibliographical references and index. 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty 
520 |a This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to consider each of the types of films used in silicon devices individually in its own chapter and to discuss typical problems seen throughout that films' history, including characterization tools which are most effectively used to clarifying and solving those problems. 
590 |a Knovel  |b Knovel (All titles) 
650 0 |a Silicon. 
650 0 |a Electric conductors. 
650 0 |a Semiconductor films. 
650 0 |a Surface chemistry. 
655 7 |a elektronické knihy  |7 fd186907  |2 czenas 
655 9 |a electronic books  |2 eczenas 
700 1 |a Strausser, Yale. 
776 0 8 |i Print version:  |t Characterization in silicon processing.  |d Boston : Butterworth-Heinemann ; Greenwich : Manning, ©1993  |z 0750691727 
830 0 |a Materials characterization series. 
856 4 0 |u https://proxy.k.utb.cz/login?url=https://app.knovel.com/hotlink/toc/id:kpCSP00001/characterization-in-silicon?kpromoter=marc  |y Full text 

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