Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics
This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal...
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| Main Author | |
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| Other Authors | , |
| Format | Electronic eBook |
| Language | English |
| Published |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
©1995.
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| Series | Materials science and process technology series.
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| Subjects | |
| Online Access | Full text |
| ISBN | 1591241448 9781591241447 9780815513698 0815513690 |
| Physical Description | 1 online resource (xv, 348 pages) : illustrations |
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| Summary: | This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1591241448 9781591241447 9780815513698 0815513690 |
| Access: | Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty |
| Physical Description: | 1 online resource (xv, 348 pages) : illustrations |