Handbook of VLSI microlithography : principles, technology, and applications

• Other Authors: Helbert, John N.
• Format: Electronic eBook
• Language: English
• Published: Park Ridge, N.J. : Norwich, N.Y. : Noyes Publications ; William Andrew Pub., ©2001.
• Edition: 2nd ed.
• Series: Materials science and process technology series. Electronic materials and process technology.
• Subjects: Integrated circuits > Very large scale integration.; Microlithography.; elektronické knihy; electronic books
• ISBN: 1591242754; 9781591242758; 9780815517801; 0815517807; 9786611411763; 6611411763; 9780815514442; 0815514441
• Physical Description: 1 online resource (xxi, 1001 pages) : illustrations

This handbook gives readers a look at the technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and X-ray lithography. The book's main theme is the specia...