Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI)

• Other Authors: McGuire, G. E.
• Format: Electronic eBook
• Language: English
• Published: Park Ridge, N.J. : Noyes Publicatons, ©1988.
• Series: Materials science and process technology series.
• Subjects: Integrated circuits > Very large scale integration > Design and construction > Handbooks, manuals, etc.; elektronické knihy; electronic books
• ISBN: 1591242525; 9781591242529; 9780815518969; 081551896X; 0815511507; 9780815511502; 1282027441; 9781282027442; 9786612027420; 6612027428; 0815518986; 9780815518983
• Physical Description: 1 online resource (xiii, 675 pages) : illustrations

A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology