Description: Handbook of semiconductor wafer cleaning technology :

Handbook of semiconductor wafer cleaning technology : science, technology, and applications

Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.

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Bibliographic Details
Other Authors:	Kern, Werner, 1925-
Format:	eBook
Language:	English
Published:	Park Ridge, N.J., U.S.A. : Noyes Publications, ©1993.
Series:	Materials science and process technology series. Electronic materials and process technology.
Subjects:	Semiconductor wafers > Cleaning. elektronické knihy electronic books
ISBN:	159124093X 9781591240938 9780815513315 0815513313 0815517726 9780815517726
Physical Description:	1 online resource (xx, 623 pages) : illustrations

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Description
Summary:	Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.
Bibliography:	Includes bibliographical references and index.
ISBN:	159124093X 9781591240938 9780815513315 0815513313 0815517726 9780815517726
Access:	Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty