Outlook and challenges of nano devices, sensors, and MEMS

This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrica...

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Bibliographic Details
Other Authors: Li, Ting., Liu, Ziv.
Format: eBook
Language: English
Published: Cham : Springer, [2017]
Subjects:
Nanotechnology.
Microelectromechanical systems.
Nanostructured materials.
elektronické knihy
electronic books
ISBN: 9783319508245
9783319508221
Physical Description: 1 online resource (xvi, 521 pages) : illustrations (some color)

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Table of contents

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245 0 0 |a Outlook and challenges of nano devices, sensors, and MEMS /  |c Ting Li, Ziv Liu, editors. 
264 1 |a Cham :  |b Springer,  |c [2017] 
300 |a 1 online resource (xvi, 521 pages) :  |b illustrations (some color) 
336 |a text  |b txt  |2 rdacontent 
337 |a počítač  |b c  |2 rdamedia 
338 |a online zdroj  |b cr  |2 rdacarrier 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty 
520 |a This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward. 
505 0 |a Introduction -- High-k dielectric for nanoscale MOS devices -- Performance, optimization, and reliability of FinFET devices -- Performance, optimization, and challenges of emerging nanowire field-effect transistors -- Graphene technology for future MEMS and sensor applications -- Nanoscale sensors for next-generation optical transceiver applications -- Nanoscale MEMS for future optical communication applications -- Nanoscale devices for biomedical applications -- Effect of nanoscale structure on reliability of nano devices and sensors -- Compact modeling of nano devices and sensors -- Three-dimensional TCAD simulation of nano semiconductor devices -- Fabrication of nano devices based on novel material -- Novel processing technology for fabricating nano devices and sensors -- Conclusions. 
504 |a Includes bibliographical references at the end of each chapters. 
590 |a SpringerLink  |b Springer Complete eBooks 
650 0 |a Nanotechnology. 
650 0 |a Microelectromechanical systems. 
650 0 |a Nanostructured materials. 
655 7 |a elektronické knihy  |7 fd186907  |2 czenas 
655 9 |a electronic books  |2 eczenas 
700 1 |a Li, Ting. 
700 1 |a Liu, Ziv. 
776 0 8 |i Print version:  |t Outlook and challenges of nano devices, sensors, and MEMS.  |d Cham : Springer, [2017]  |z 3319508229  |w (DLC) 2017931961  |w (OCoLC)962895641 
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