Piezoelectric MEMS resonators

"This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future res...

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Bibliographic Details
Other Authors: Bhugra, Harmeet, (Editor), Piazza, Gianluca, (Editor)
Format: eBook
Language: English
Published: Cham, Switzerland : Springer Nature, [2017]
Series: Microsystems and nanosystems.
Subjects:
ISBN: 9783319286884
9783319286860
Physical Description: 1 online resource (424 pages) : illustrations

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Table of contents

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072 7 |a 621.38  |x Elektronika  |2 Konspekt  |9 19 
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245 0 0 |a Piezoelectric MEMS resonators /  |c Harmeet Bhugra, Gianluca Piazza, editors. 
264 1 |a Cham, Switzerland :  |b Springer Nature,  |c [2017] 
264 4 |c ©2017 
300 |a 1 online resource (424 pages) :  |b illustrations 
336 |a text  |b txt  |2 rdacontent 
337 |a počítač  |b c  |2 rdamedia 
338 |a online zdroj  |b cr  |2 rdacarrier 
490 1 |a Microsystems and nanosystems 
504 |a Includes bibliographical references and index. 
506 |a Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty 
520 |a "This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ... and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers"- Resumé vydavatel 
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650 0 9 |a piezoelectric resonators  |2 eczenas 
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700 1 |a Bhugra, Harmeet,  |e editor. 
700 1 |a Piazza, Gianluca,  |e editor. 
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