Optical scattering measurement and analysis

The first edition of this book concentrated on relating scatter from optically smooth surfaces to the microroughness on those surfaces. After spending six years in the semiconductor industry, Dr. Stover has updated and expanded the third edition. Newly included are scatter models for pits and partic...

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Bibliographic Details
Main Author Stover, John C.
Corporate Author Society of Photo-optical Instrumentation Engineers
Format Electronic eBook
LanguageEnglish
Published Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2012.
Edition3rd ed.
SeriesSPIE monograph ; PM224.
SPIE Digital Library.
Subjects
Light > Scattering.
elektronické knihy
electronic books
Online AccessFull text
ISBN9780819492524
9780819492517
Physical Description1 online zdroj (xxiv, 302 pages) : illustrations, digital file.

Cover

Table of Contents:
  • Preface to the first edition
  • Preface to the second edition
  • Acknowledgments for the second edition
  • Preface to the third edition
  • Acknowledgments for the third edition
  • List of acronyms
  • Chapter 1. Quantifying light scatter
  • Chapter 2. Quantifying surface roughness
  • Chapter 3. Scatter calculations and diffraction theory
  • Chapter 4. Using Rayleigh-Rice to calculate smooth-surface statistics from the BRDF
  • Chapter 5. Polarization of scattered light
  • Chapter 6. Scattering models for discrete surface features
  • Chapter 7. Instrumentation and measurement issues
  • Chapter 8. Predicting scatter from roughness
  • Chapter 9. Detection of discrete defects
  • Chapter 10. Appearance and scattered light
  • Chapter 11. Industrial applications
  • Chapter 12. Published scatter standards
  • Chapter 13. Scatter specifications
  • Appendix A. Review of electromagnetic wave propagation
  • Appendix B. Kirchhoff diffraction from sinusoidal gratings
  • Appendix C. BSDF data
  • Appendix D. Units
  • References
  • Works consulted.

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