EUV lithography
Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an histor...
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| Other Authors | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Bellingham, Wash. : Hoboken, NJ :
SPIE Press ; John Wiley,
c2009.
|
| Series | SPIE monograph ;
PM178. |
| Subjects | |
| Online Access | Full text |
| ISBN | 9781615837175 9780819480705 9780819469649 9780470471555 |
| Physical Description | 1 online zdroj (xxvii, 673 p.) : ill. |
Glossary of Terms