Fundamental principles of engineering nanometrology
The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale. The establishment of common standards will be an essentia...
Saved in:
| Main Author | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
Oxford : Amsterdam :
William Andrew ; Elsevier Science,
©2010.
|
| Edition | 1st ed. |
| Series | Micro & nano technologies.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 9780080964546 9781437778328 |
| Physical Description | 1 online zdroj (xxvi, 321 pages) : illustrations. |
Glossary of Terms