Nanolithography and patterning techniques in microelectronics

Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using na...

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Bibliographic Details
Other Authors Bucknall, David G.
Format Electronic eBook
LanguageEnglish
Published Cambridge : Boca Raton, FL : Woodhead Pub. ; CRC Press, ©2005.
SeriesWoodhead Publishing in materials.
Subjects
Microlithography.
Nanotechnology.
elektronické knihy
electronic books
Online AccessFull text
ISBN9781615831869
9781855739314
9781845690908
9780849334474
Physical Description1 online zdroj (xiv, 409 pages) : illustrations.

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245 0 0 |a Nanolithography and patterning techniques in microelectronics  |h [elektronický zdroj] /  |c edited by David G. Bucknall. 
260 |a Cambridge :  |b Woodhead Pub. ;  |a Boca Raton, FL :  |b CRC Press,  |c ©2005. 
300 |a 1 online zdroj (xiv, 409 pages) :  |b illustrations. 
336 |a text  |b txt  |2 rdacontent 
337 |a počítač  |b c  |2 rdamedia 
338 |a online zdroj  |b cr  |2 rdacarrier 
490 1 |a Woodhead Publishing in materials 
504 |a Includes bibliographical references and index. 
505 0 |a Prelium; Contents; Block copolymer nanolithography; Surface-induced structure formation of polymer blends; Rapid prototyping of functional microfabricated devices by soft lithography; Chemomechanical surface modification of materials for patterning; Patterning of polymer thin films; Ion beam patterning; Nanofabrication by shadow deposition through nanostencils; Photolithography beyond the diffraction limit; Ink-jet printing as a tool in manufacturing and instrumentation; Actuators and patterns for microfluidic control; Manipulation of biomolecules and reactions. 
520 |a Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using nanolithography scientists can drive patterning currents through surfaces while building a 3D structure from a series of patterned layers. Electron induced chemical lithography can create ultra-high resolution templates for the site selective immobilisation of molecules, to form functional, hierarchic. 
590 |a Knovel Library  |b ACADEMIC - Nanotechnology 
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650 0 |a Nanotechnology. 
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700 1 |a Bucknall, David G. 
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830 0 |a Woodhead Publishing in materials. 
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