Nanolithography and patterning techniques in microelectronics
Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using na...
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| Other Authors | |
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| Format | Electronic eBook |
| Language | English |
| Published |
Cambridge : Boca Raton, FL :
Woodhead Pub. ; CRC Press,
©2005.
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| Series | Woodhead Publishing in materials.
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| Subjects | |
| Online Access | Full text |
| ISBN | 9781615831869 9781855739314 9781845690908 9780849334474 |
| Physical Description | 1 online zdroj (xiv, 409 pages) : illustrations. |
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| Summary: | Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using nanolithography scientists can drive patterning currents through surfaces while building a 3D structure from a series of patterned layers. Electron induced chemical lithography can create ultra-high resolution templates for the site selective immobilisation of molecules, to form functional, hierarchic. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781615831869 9781855739314 9781845690908 9780849334474 |
| Access: | Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity |
| Physical Description: | 1 online zdroj (xiv, 409 pages) : illustrations. |