Nanofabrication fundamentals and applications

• Other Authors: Tseng, A. A.
• Format: eBook
• Language: English
• Published: Singapore ; Hackensack, NJ : World Scientific, c2008.
• Subjects: Nanostructured materials.; Nanostructures.; Scanning probe microscopy.; Lithography, Electron beam.; elektronické knihy; electronic books
• ISBN: 9789812790897; 9781613447789; 9789812700766; 9789812705426; 9781281933591
• Physical Description: 1 online zdroj (viii, 574 p.) : ill. (some col.)

Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is v...