Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control

Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processin...

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Bibliographic Details
Main Author: Mattox, D. M.
Format: eBook
Language: English
Published: Westwood, N.J. : Noyes Publications, ©1998.
Subjects:
Vapor-plating > Handbooks, manuals, etc.
elektronické knihy
electronic books
ISBN: 9781591240792
9780815514220
Physical Description: 1 online zdroj (xxvii, 917 pages) : illustrations

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Summary: Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processing. Also covers the more widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes.
Bibliography: Includes bibliographical references and index.
ISBN: 9781591240792
9780815514220
Access: Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity

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