Introduction to semiconductor technology
Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs toda...
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Main Author: | |
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Corporate Author: | |
Format: | eBook |
Language: | English |
Published: |
Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) :
SPIE,
2012.
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Edition: | 2nd ed. |
Series: | SPIE monograph ;
PM220. SPIE Digital Library. |
Subjects: | |
ISBN: | 9780819490933 9781628701043 9780819490926 |
Physical Description: | 1 online zdroj (xix, 656 pages) : illustrations, digital file. |
Summary: | Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations. |
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Item Description: | "SPIE Digital Library."--Website. |
Bibliography: | Includes bibliographical references. |
ISBN: | 9780819490933 9781628701043 9780819490926 |
Access: | Plný text je dostupný pouze z IP adres počítačů Univerzity Tomáše Bati ve Zlíně nebo vzdáleným přístupem pro zaměstnance a studenty univerzity |