A guide to hands-on MEMS design and prototyping

"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fa...

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Bibliographic Details
Main Author Kubby, Joel A.
Format Electronic eBook
LanguageEnglish
Published Cambridge, UK ; New York : Cambridge University Press, 2011.
Subjects
Microelectromechanical systems.
elektronické knihy
electronic books
Online AccessFull text
ISBN9781139109895
9781139127080
9780511984662
9781139114257
9781139116428
9781139122160
9780521889254
9781107645790
Physical Description1 online zdroj (xi, 166 pages, [16] pages of plates) : illustrations (some color)

Cover

Table of Contents:
  • Preface; 1 Introduction; 2 Micromechanics; 3 Electrostatic Actuation; 4 Optical MEMS; 5 Thermal MEMS; 6 Fluidic MEMS; 7 Package and Test; 8 From Prototype to Product: MEMS Deformable Mirrors for Adaptive Optics.

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