A guide to hands-on MEMS design and prototyping

"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fa...

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Bibliographic Details
Main Author Kubby, Joel A.
Format Electronic eBook
LanguageEnglish
Published Cambridge, UK ; New York : Cambridge University Press, 2011.
Subjects
Microelectromechanical systems.
elektronické knihy
electronic books
Online AccessFull text
ISBN9781139109895
9781139127080
9780511984662
9781139114257
9781139116428
9781139122160
9780521889254
9781107645790
Physical Description1 online zdroj (xi, 166 pages, [16] pages of plates) : illustrations (some color)

Cover

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245 1 2 |a A guide to hands-on MEMS design and prototyping  |h [elektronický zdroj] /  |c Joel Kubby. 
260 |a Cambridge, UK ;  |a New York :  |b Cambridge University Press,  |c 2011. 
300 |a 1 online zdroj (xi, 166 pages, [16] pages of plates) :  |b illustrations (some color) 
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337 |a počítač  |b c  |2 rdamedia 
338 |a online zdroj  |b cr  |2 rdacarrier 
504 |a Includes bibliographical references and index. 
520 |a "Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Additional resources are provided online, including solutions to the design challenge problems and a selection of case studies of MEMS devices"--  |c Provided by publisher. 
505 0 |a Preface; 1 Introduction; 2 Micromechanics; 3 Electrostatic Actuation; 4 Optical MEMS; 5 Thermal MEMS; 6 Fluidic MEMS; 7 Package and Test; 8 From Prototype to Product: MEMS Deformable Mirrors for Adaptive Optics. 
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