Fabrication engineering at the micro and nanoscale
Saved in:
| Main Author | |
|---|---|
| Format | Electronic eBook |
| Language | English |
| Published |
New York :
Oxford University Press,
2008.
|
| Edition | 3rd ed. |
| Series | Oxford series in electrical and computer engineering.
|
| Subjects | |
| Online Access | Full text |
| ISBN | 9781613441107 9780195320176 |
| Physical Description | 1 online zdroj (xiv, 647 p.) : ill. |
Glossary of Terms